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Instrumentation
Dimension 3100 Atomic Force Microscope
The Dimension 3100 Scanning Probe Microscope (SPM) utilizes automated atomic force microscopy (AFM) and
scanning tunneling microscopy (STM) techniques to measure surface
characteristics for semiconductor wafers, lithography masks, magnetic
media, CDs/DVDs, biomaterials, optics, and other samples up to 200 mm in
diameter. Its laser spot alignment system and the ability to change
scanning techniques without tools guarantee flexibility, ease of use,
and high product throughput.
Specifications
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Stage
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Inspectable
Area: 120mm × 100mm × 12mm
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Resolution: 2μm
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Unidirectional
repeatability: 3μm typical, 10μm maximum
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Bidirectional
repeatability:
4μm for x-axis, 6μm typical for point
to point motion
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Rotation:
360˚
Optical Microscope
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A
computer-controlled illuminator for easier optical focusing and
zooming
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410-1845
magnification range corresponding field of view of 180-810 μm
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Video image capture
capability
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1.5 μm
resolution
Scanner
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Travel (Approx.
scan size): X-axis 90μm
Y-axis 90μm
Z-axis 6μm
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Electronic
Resolution: 16 bit (all axes)
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Accuracy: <1% Typ., 2% max of selected
scan size
Orthogonality: <2 degrees
Unconrrected Z Bow: 50nm @ 90μm scan size
2μm @ 10 μm scan size
Scan Modes
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Contact Mode
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Tapping Mode
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Phasing Imaging
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Scanning Tunneling
Microscopy(STM)
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Lateral Force
Mode(LFM)
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Force Imaging
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Interleave Scanning
and Lift Mode
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Magnetic Force
Imaging
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Electric Force
Imaging
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Scanning Thermal
Microscopy(SThM)
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Tunneling Atomic
Force Microscopy(TUNA)
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